MKSI

MKS Instruments

Information Technology›Semiconductors & Semiconductor Equipment›Semiconductor Materials & Equipment

19 stocks · 12 ETFs

data as of Aug 24, 2026

REPLACEMENT RESEARCH

Tax-loss harvesting alternatives for MKSI

Among the 19 Semiconductor Materials & Equipment peers screened, LRCX (Lam Research) has tracked MKSI most closely over the past year, with a return correlation of 0.83. The strongest fund stand-in is PSI (Invesco Semiconductors ETF) at 0.87 over the past year. Correlations are computed from daily closing-price returns aligned by trading day.

Run this search live in the Screener →

STOCKS

Single-name peers

Ticker	Name	Sub-industry	1Y	3Y	5Y	10Y
LRCX	Lam Research	Semiconductor Materials & Equipment	0.83	0.83	0.82	0.83
AMAT	Applied Materials	Semiconductor Materials & Equipment	0.80	0.80	0.81	0.82
ONTO	Onto Innovation	Semiconductor Materials & Equipment	0.80	0.73	0.74	0.75
KLAC	KLA Corp.	Semiconductor Materials & Equipment	0.78	0.79	0.79	0.79
COHU	Cohu, Inc.	Semiconductor Materials & Equipment	0.77	0.74	0.74	0.68
AEIS	Advanced Energy	Semiconductor Materials & Equipment	0.76	0.76	0.76	0.76
UCTT	Ultra Clean Holdings, Inc.	Semiconductor Materials & Equipment	0.76	0.76	0.75	0.71
ENTG	Entegris	Semiconductor Materials & Equipment	0.75	0.79	0.78	0.77
PDFS	PDF Solutions, Inc.	Semiconductor Materials & Equipment	0.73	0.69	0.64	0.58
ASML	ASML Holding	Semiconductor Materials & Equipment	0.72	0.73	0.74	0.74
ICHR	Ichor Holdings, Ltd.	Semiconductor Materials & Equipment	0.72	0.71	0.72	0.70
KLIC	Kulicke and Soffa Industries, Inc.	Semiconductor Materials & Equipment	0.70	0.74	0.72	0.68
FORM	FormFactor, Inc.	Semiconductor Materials & Equipment	0.70	0.72	0.71	0.69
ACMR	ACM Research, Inc.	Semiconductor Materials & Equipment	0.70	0.57	0.55	0.49
TER	Teradyne Inc.	Semiconductor Materials & Equipment	0.69	0.71	0.73	0.74
ACLS	Axcelis Technologies, Inc.	Semiconductor Materials & Equipment	0.67	0.70	0.71	0.69
VECO	Veeco Instruments Inc.	Semiconductor Materials & Equipment	0.64	0.69	0.69	0.62
Q	Qnity Electronics	Semiconductor Materials & Equipment	0.63	—	—	—
PLAB	Photronics, Inc.	Semiconductor Materials & Equipment	0.55	0.61	0.61	0.60

ETFS

Fund stand-ins

An ETF is generally not 'substantially identical' to a single stock, which is why funds are the standard wash-sale-aware replacement.

Ticker	Name	Focus	Match	1Y	3Y	5Y	10Y
PSI	Invesco Semiconductors ETF	Semiconductors	INDUSTRY	0.87	0.88	0.87	0.87
SOXX	iShares Semiconductor ETF	Semiconductors	INDUSTRY	0.81	0.85	0.85	0.85
SMH	VanEck Semiconductor ETF	Semiconductors	INDUSTRY	0.81	0.82	0.83	0.83
XSD	SPDR S&P Semiconductor ETF	Semiconductors (Equal Wt)	INDUSTRY	0.78	0.84	0.84	0.83
XLK	Technology Select Sector SPDR	Tech Sector	SECTOR	0.71	0.75	0.76	0.74
QQQM	Invesco Nasdaq 100 ETF	Nasdaq 100	BROAD	0.70	0.74	0.74	—
QQQ	Invesco QQQ Trust	Nasdaq 100	BROAD	0.70	0.74	0.74	0.72
FTEC	Fidelity MSCI Info Tech ETF	Tech Sector	SECTOR	0.69	0.75	0.76	0.74
VGT	Vanguard Info Tech ETF	Tech Sector	SECTOR	0.69	0.75	0.76	0.74
HACK	ETFMG Prime Cyber Security	Cybersecurity	SUB-IND	0.25	0.47	0.53	0.57
BUG	Global X Cybersecurity ETF	Cybersecurity	SUB-IND	0.16	0.38	0.46	0.49
IGV	iShares Expanded Tech-Software	Software	INDUSTRY	0.10	0.41	0.52	0.58

NEXT STEPS

Harvesting a loss in MKSI?

Estimate what the harvest could save →Check the eight wash-sale traps →Document the trade with a Tax Memo →

Replacement research for MKSI's peers

LRCX AMAT ONTO KLAC COHU AEIS UCTT ENTG PDFS ASML ICHR KLIC FORM ACMR TER ACLS VECO Q PLAB

Browse all tickers →

Method: Pearson correlation of daily closing-price returns, Yahoo Finance data, series aligned by trading day, refreshed weekly. A cell is blank when overlapping history covers less than 60% of its window. Correlation is descriptive, not predictive. Wash-sale treatment depends on facts and circumstances — confirm with a tax professional. Not investment advice.